Program overview

Cleaning machine is the surface treatment of silicon wafer equipment, whose the main role is removing contaminants on silicon wafer surface and their own oxides, to get the wafer in line with the requirements of cleanliness

Our solution

Program Features

  • Production capacity improved

    EtherCat network , improve the production capacity of the entire cell equipment process
  • High coincidence accuracy

    High precision, high response positioning,Ensure the accuracy of transplanting flower basket in each slot