Program overview

Feeding and unloading machine for PECVD is for automatic loading of wafers from the cassette to the PECVD graphite boat or from the PECVD graphite boat to the wafer cassette

Our solution

Program Features

  • Reduced fragmentation rate

    Repetitive precision positioning is accurate, which greatly reduces the fragmentation rate compared with traditional loading and unloading pieces
  • High coincidence accuracy

    High-speed Ethernet, high-response positioning, gentle movements during contact with the silicon wafer during transportation to reduce debris